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마이크로 IR 센서용 PbTiO//3 박막 및 구조물 제작

Authors

Sang-Seop Yom; 박재석; Ju Byeong Kwon; CHOI HYUN SEOK; 오영재; CHUNG MOONKYO; SUH SANG HEE

Issue Date

1998-02

Citation

제 7 회 유전체 물성 심포지움, pp.?

Keywords

MEMS

URI

https://pubs.kist.re.kr/handle/201004/110262

Appears in Collections:

KIST Conference Paper > Others

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