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Other Titles
마이크로 IR 센서용 PbTiO//3 박막 및 구조물 제작
Authors
Sang-Seop Yom박재석Ju Byeong KwonCHOI HYUN SEOK오영재CHUNG MOONKYOSUH SANG HEE
Citation
제 7 회 유전체 물성 심포지움, pp.?
Keywords
MEMS
URI
https://pubs.kist.re.kr/handle/201004/110262
Appears in Collections:
KIST Conference Paper > Others
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