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The effect of low temperature GaN-buffer layer on the growth of thick GaN using HVPE

Other Titles

Hydride vapor phase epitaxy를 이용한 저온 GaN 완충층이 후막 GaN 성장특성에 미치는 영향

Authors

이정욱; 백호선; 유지범; Kim Gyeung Ho; Kum Dong Wha

Citation

대한금속학회회보 = Bull. Kor. Inst. Met. & Mater., v.11, no.5, pp.499 - 504

Keywords

Hydride Vapor Phase Epitaxy(HVPE); GaN-buffer; thick GaN film; cross sectional TEM

ISSN

1225-1550

URI

https://pubs.kist.re.kr/handle/201004/110411

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KIST Conference Paper > Others

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