DSpace at KISTKIST Conference PaperOthers

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dc.contributor.author김동준-
dc.contributor.authorKim Yong Tae-
dc.contributor.author박종완-
dc.date.accessioned2024-01-13T20:02:57Z-
dc.date.available2024-01-13T20:02:57Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/110867-
dc.languageEnglish-
dc.subjectTa-Si-N thin film-
dc.titleEffects of nitrogen on preventing the crystallization of amorphous Ta-Si-N diffusion barrier-
dc.typeConference-
dc.description.journalClass1-
dc.identifier.bibliographicCitation1997 MRS spring meeting, San Francisco, pp.185-
dc.citation.title1997 MRS spring meeting, San Francisco-
dc.citation.startPage185-
dc.citation.endPage185-
dc.citation.conferencePlaceUS-
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