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Effects of nitrogen on preventing the crystallization of amorphous Ta-Si-N diffusion barrier

Authors

김동준; Kim Yong Tae; 박종완

Citation

1997 MRS spring meeting, San Francisco, pp.185

Keywords

Ta-Si-N thin film

URI

https://pubs.kist.re.kr/handle/201004/110867

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KIST Conference Paper > Others

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