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dc.contributor.authorJu Byeong Kwon-
dc.contributor.author박재석-
dc.contributor.authorCHUNG MOONKYO-
dc.contributor.authorSang-Seop Yom-
dc.contributor.authorSUH SANG HEE-
dc.contributor.author장진-
dc.contributor.authorOH MYUNG HWAN-
dc.date.accessioned2024-01-13T20:34:24Z-
dc.date.available2024-01-13T20:34:24Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/111227-
dc.languageEnglish-
dc.subjectMEMS-
dc.subjectintergrated sensor-
dc.subjectmicromechanical structure-
dc.titleFabrication of micromechanical structures for integrated IR sensor application-
dc.title.alternativeIntegrated IR sensor 용 마이크로 구조물 제작-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitation한국물리학회 가을 학술논문발표회 논문초록집 , 광운대, pp.306-
dc.citation.title한국물리학회 가을 학술논문발표회 논문초록집 , 광운대-
dc.citation.startPage306-
dc.citation.endPage306-
dc.citation.conferencePlaceKO-
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