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Fabrication of micromechanical structures for integrated IR sensor application

Other Titles

Integrated IR sensor 용 마이크로 구조물 제작

Authors

Ju Byeong Kwon; 박재석; CHUNG MOONKYO; Sang-Seop Yom; SUH SANG HEE; 장진; OH MYUNG HWAN

Citation

한국물리학회 가을 학술논문발표회 논문초록집 , 광운대, pp.306

Keywords

MEMS; intergrated sensor; micromechanical structure

URI

https://pubs.kist.re.kr/handle/201004/111227

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KIST Conference Paper > Others

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