Direct shrinkage observation of oxidation induced stacking faults in p-type CZ silicon.

Authors
Kim Yong TaeMin Suk-Ki
Citation
Proc. 1986 Seoul int. symp. phys. semicond. & appl., pp.?
URI
https://pubs.kist.re.kr/handle/201004/111358
Appears in Collections:
KIST Conference Paper > Others
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