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dc.contributor.authorJu Byeong Kwon-
dc.contributor.authorOH MYUNG HWAN-
dc.contributor.authorS. J. Lee-
dc.contributor.authorS. N. Lee-
dc.contributor.authorS. W. Lee-
dc.contributor.authorD. Jeon-
dc.contributor.authorK. R. Lee-
dc.date.accessioned2024-01-13T21:02:41Z-
dc.date.available2024-01-13T21:02:41Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/111377-
dc.languageEnglish-
dc.subjectfield emitter-
dc.subjectfield emission display-
dc.subjectmicromachining-
dc.subjectdiamond-coated silicon tip-
dc.titleFabrication of self-aligned silicon field emitters coated with diamond-like carbon-
dc.typeConference-
dc.description.journalClass1-
dc.identifier.bibliographicCitationTechnical digest of 9th international vacuum microelectronics conference, St. Petersburg, Russia., pp.283 - 287-
dc.citation.titleTechnical digest of 9th international vacuum microelectronics conference, St. Petersburg, Russia.-
dc.citation.startPage283-
dc.citation.endPage287-
dc.citation.conferencePlaceKO-
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