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Fabrication of self-aligned silicon field emitters coated with diamond-like carbon

Authors

Ju Byeong Kwon; OH MYUNG HWAN; S. J. Lee; S. N. Lee; S. W. Lee; D. Jeon; K. R. Lee

Citation

Technical digest of 9th international vacuum microelectronics conference, St. Petersburg, Russia., pp.283 - 287

Keywords

field emitter; field emission display; micromachining; diamond-coated silicon tip

URI

https://pubs.kist.re.kr/handle/201004/111377

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KIST Conference Paper > Others

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