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Experimental analysis of the process of anodic bonding with an evaporated glass layer

Authors

최우범; Ju Byeong Kwon; LEE YUN HI; S. J. Jeong; M. R. Haskard; LEE NAM YANG; 성만영; OH MYUNG HWAN

Citation

MRS 1996 fall meeting, Boston, USA., pp.?

Keywords

MEMS

URI

https://pubs.kist.re.kr/handle/201004/111454

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KIST Conference Paper > Others

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