Ultra-high precision grinding of the glass surface by the surface-charged abrasive tool.

Authors
SON JUNG YOUNGYu. N. LokhovI. V. Moskalev
Citation
SPIE proc. : optics for science and new technology, v.v. 2778, pp.1014
URI
https://pubs.kist.re.kr/handle/201004/111550
Appears in Collections:
KIST Conference Paper > Others
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