Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Jung Woo Sang | - |
| dc.contributor.author | 김병준 | - |
| dc.contributor.author | 최길현 | - |
| dc.contributor.author | LEE SUNG MIN | - |
| dc.contributor.author | 고영범 | - |
| dc.date.accessioned | 2024-01-13T22:00:25Z | - |
| dc.date.available | 2024-01-13T22:00:25Z | - |
| dc.date.created | 2021-09-29 | - |
| dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/111786 | - |
| dc.language | English | - |
| dc.subject | H//2O emission from SOG | - |
| dc.title | The effect of H//2O from SOG on the reliability of sub-micron vias. | - |
| dc.type | Conference | - |
| dc.description.journalClass | 1 | - |
| dc.identifier.bibliographicCitation | 제 56 회 응용물리학회 학술강연회 , Kanazawa, v.Process 기술 B, pp.? | - |
| dc.citation.title | 제 56 회 응용물리학회 학술강연회 , Kanazawa | - |
| dc.citation.volume | Process 기술 B | - |
| dc.citation.startPage | ? | - |
| dc.citation.endPage | ? | - |
| dc.citation.conferencePlace | JA | - |
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