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The effect of H//2O from SOG on the reliability of sub-micron vias.

Authors

Jung Woo Sang; 김병준; 최길현; LEE SUNG MIN; 고영범

Citation

제 56 회 응용물리학회 학술강연회 , Kanazawa, v.Process 기술 B, pp.?

Keywords

H//2O emission from SOG

URI

https://pubs.kist.re.kr/handle/201004/111786

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KIST Conference Paper > Others

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