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Experimental determination of particle deposition velocity toward the horizontal and vertical wafer surfaces

Authors

Bae Gwi-Nam; Chun-Sik Lee; NO HEE CHEON

Citation

Proceedings of the 12th ISCC in Yokohama., pp.609 - 613

Keywords

particle deposition velocity; horizontal wafer; vertical wafer

URI

https://pubs.kist.re.kr/handle/201004/112183

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KIST Conference Paper > Others

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