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dc.contributor.authorCho Won Il-
dc.contributor.author주재백-
dc.contributor.author이철환-
dc.contributor.authorYun Kyung Suk-
dc.date.accessioned2024-01-13T23:03:14Z-
dc.date.available2024-01-13T23:03:14Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/112488-
dc.languageEnglish-
dc.subjectmetal/insulator/semiconductor-
dc.subjectp-type silicon-
dc.subjectsilicon oxide-
dc.subjecthydrogen-
dc.subjectresponse time-
dc.subjectregeneration time-
dc.subjectvoltage shift-
dc.subjectpalladium-
dc.subjectsurface coverage-
dc.titleHydrogen sensing properties of Pd-MIS sensors.-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitationProceedings of the Korea-Japan joint symposium on chemical sensors, pp.128 - 133-
dc.citation.titleProceedings of the Korea-Japan joint symposium on chemical sensors-
dc.citation.startPage128-
dc.citation.endPage133-
dc.citation.conferencePlaceKO-
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