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Hydrogen sensing properties of Pd-MIS sensors.

Authors

Cho Won Il; 주재백; 이철환; Yun Kyung Suk

Citation

Proceedings of the Korea-Japan joint symposium on chemical sensors, pp.128 - 133

Keywords

metal/insulator/semiconductor; p-type silicon; silicon oxide; hydrogen; response time; regeneration time; voltage shift; palladium; surface coverage

URI

https://pubs.kist.re.kr/handle/201004/112488

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KIST Conference Paper > Others

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