KIST Library Institutional Repository

Spectroscopic ellipsometry measurements on the silicon nitride films formed by PECVD in InP.

Authors

KANG KWANG NHAM; Lee Jung Il; Han Il Ki; 김상열

Citation

한국물리학회 학술발표회 , 전북대, pp.?

Keywords

silicon nitride

URI

https://pubs.kist.re.kr/handle/201004/112520

Appears in Collections:

KIST Conference Paper > Others

Files in This Item:

There are no files associated with this item.

Export

RIS (EndNote)

XLS (Excel)

XML