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Defect states in silicon after laser processing.

Authors

Kim Seong Il; Min Suk-Ki; CHOI WON CHEOL; KIM EUN KYU; CHO HOON YOUNG; KIM CHUN KEUN

Citation

Bull. Korean phys. soc., v.v. 9, no.no. 1, pp.66 - ?

Keywords

silicon; defect; laser

URI

https://pubs.kist.re.kr/handle/201004/112547

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KIST Conference Paper > Others

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