KIST Library Institutional Repository

Crystal growth of Si and BP on Si substrates using B2H6-PH3-H2 system

Authors

Ju Byeong Kwon; J. H. Ki; C. J. Kim

Citation

International symposium on the physics of semiconductor and its application, Seoul, Korea., pp.?

Keywords

silicon on insulator; SOI device

URI

https://pubs.kist.re.kr/handle/201004/112829

Appears in Collections:

KIST Conference Paper > Others

Files in This Item:

There are no files associated with this item.

Export

RIS (EndNote)

XLS (Excel)

XML