Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | CHOI, WON KOOK | - |
| dc.date.accessioned | 2024-01-14T00:00:51Z | - |
| dc.date.available | 2024-01-14T00:00:51Z | - |
| dc.date.created | 2022-01-14 | - |
| dc.date.issued | 1989-07-01 | - |
| dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/112882 | - |
| dc.title | CO2 laser-induced CVD법에 의한 silicon박막 및 p-n접합 silicon 제작 | - |
| dc.title.alternative | Silicon thin film and p-n junction diode made by CO2 laser-induced CVD method | - |
| dc.type | Conference | - |
| dc.description.journalClass | 2 | - |
| dc.identifier.bibliographicCitation | 한국진공학회, pp.115 - 119 | - |
| dc.citation.title | 한국진공학회 | - |
| dc.citation.startPage | 115 | - |
| dc.citation.endPage | 119 | - |
| dc.relation.isPartOf | The proceedings of the 4th applied physics symposium on the surface and interface | - |
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