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CO2 laser-induced CVD법에 의한 silicon박막 및 p-n접합 silicon 제작

Other Titles

Silicon thin film and p-n junction diode made by CO2 laser-induced CVD method

Authors

CHOI, WON KOOK

Issue Date

1989-07-01

Citation

한국진공학회, pp.115 - 119

URI

https://pubs.kist.re.kr/handle/201004/112882

Appears in Collections:

KIST Conference Paper > Others

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