Metamorphic growth of 0.1 eV InAsSb on InAs/GaAs virtual substrate for LWIR applications
- Authors
- Woo, Seungwan; Yeon, Eungbeom; Chu, Rafael Jumar; Kyhm, Jihoon; Son, Hoki; Jang, Ho Won; Jung, Daehwan; Choi, Won Jun
- Issue Date
- 2023-06
- Publisher
- Elsevier BV
- Citation
- Applied Surface Science, v.623
- Abstract
- Epitaxial growth of bulk InAs1-xSbx layer on GaAs substrate could open an opportunity for cost-competitive long -wavelength infrared sensors. Achieving this requires a high-quality metamorphic InAsSb layer with a uniform strain relief buffer design. We report a comprehensive analysis of metamorphic InAsSb layers grown on InAs/ GaAs virtual substrate for 0.1 eV low bandgap material with an optimized growth condition and group-V flux control. We find that InAsSb surface roughens significantly with increasing Sb composition up to 58%. Lowering the growth temperature of InAsSb layers from 450 degrees C to 425 degrees C mitigated surface roughening while allowing greater than 90% strain relaxation. Moreover, we also present a dramatically increasing threading dislocation density by more than 200 times as a consequence of high Sb composition. Finally, we demonstrate a narrow energy bandgap of 0.13 eV at 10 K in the InAs0.42Sb0.58 layer, which is close to 0.1 eV at room temperature. This InAsSb film grown on InAs/GaAs template paves the way for long-wavelength infrared optoelectronics applications.
- Keywords
- SURFACE-MORPHOLOGY; LAYER; DISLOCATIONS; RELAXATION; MISFIT; GAAS; INSB; InAsSb; Metamorphic growth; Strain engineering; Threading dislocation density; Long -wavelength infrared; Molecular beam epitaxy
- ISSN
- 0169-4332
- URI
- https://pubs.kist.re.kr/handle/201004/113717
- DOI
- 10.1016/j.apsusc.2023.156899
- Appears in Collections:
- KIST Article > 2023
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