DSpace at KISTKIST Conference Paper2018

Semiconductor-insulator-semiconductor (SIS) structures for high-performance optical modulation

Authors
Han, Jae-Hoon; Takenaka, Mitsuru; Takagi, Shinichi
Issue Date
2018-07
Publisher
IEEE
Citation
23rd Opto-Electronics and Communications Conference (OECC)
Abstract
Material engineering for semiconductor-insulator-semiconductor (SIS) structures is important for a high-performance optical modulator. We have suggested an InGaAsP/Si hybrid SIS structure using direct wafer bonding with high-k dielectrics for using high electron effect in InGaAsP.
ISSN
2166-8884
URI
https://pubs.kist.re.kr/handle/201004/114351
Appears in Collections:
KIST Conference Paper > 2018
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