Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Park, YJ | - |
dc.contributor.author | Cho, YS | - |
dc.contributor.author | Koh, EK | - |
dc.contributor.author | Kim, EK | - |
dc.contributor.author | Kim, GG | - |
dc.contributor.author | Byun, DJ | - |
dc.contributor.author | Min, SK | - |
dc.date.accessioned | 2024-01-19T16:08:56Z | - |
dc.date.available | 2024-01-19T16:08:56Z | - |
dc.date.created | 2022-03-07 | - |
dc.date.issued | 2001 | - |
dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/117915 | - |
dc.language | English | - |
dc.publisher | JAPAN SOCIETY APPLIED PHYSICS | - |
dc.title | Implantation of N-ion on sapphire substrate for GaN epilayer | - |
dc.type | Conference | - |
dc.description.journalClass | 1 | - |
dc.identifier.bibliographicCitation | International Microprocesses and Nanotechnology Conference, pp.222 - 223 | - |
dc.citation.title | International Microprocesses and Nanotechnology Conference | - |
dc.citation.startPage | 222 | - |
dc.citation.endPage | 223 | - |
dc.citation.conferencePlace | JA | - |
dc.citation.conferencePlace | KUNIBIKI MESSE, JAPAN | - |
dc.citation.conferenceDate | 2001-10-31 | - |
dc.relation.isPartOf | MICROPROCESSES AND NANOTECHNOLOGY 2001, DIGEST OF PAPERS | - |
dc.identifier.wosid | 000175849600111 | - |
dc.identifier.scopusid | 2-s2.0-84960437438 | - |
dc.type.docType | Proceedings Paper | - |
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