Microactuators driven by giant magnetostrictive thin films

Abstract

Giant magnetostrictive thin films of amorphous Tb-Fe and Sm-Fe based alloys exhibiting excellent magnetostrictive characteristics at low magnetic fields are developed from a systematic investigation with a particular emphasis being placed to examine B effects. Magnetostrictions of 173 ppm and 585 ppm are achieved in B containing Tb-Fe and Sm-Fe thin films, respectively, at a magnetic field of 100 Oe. Magnetostrictive thin films with these magnetostrictive levels are considered to be suitable for Si-based microdevices. The suitability is tested by fabricating and characterizing microactuators, microvalves and optical switches driven by giant magnetostrictive thin films.