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Structure and mechanical properties of nitrogen incorporated diamond-like carbon films

Authors

LEE, KR; EUN, KY; RHEE, JS

Issue Date

1995

Publisher

MATERIALS RESEARCH SOC

Citation

Symposium on Thin Films - Stresses and Mechanical Properties V, at the 1994 Fall Meeting of the Materials-Research-Society, v.356, pp.233 - 238

ISSN

0272-9172

URI

https://pubs.kist.re.kr/handle/201004/119057

Appears in Collections:

KIST Conference Paper > Others

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