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TEM STUDIES OF PLASMA-DEPOSITED TUNGSTEN AND TUNGSTEN NITRIDE BARRIERS FOR THERMALLY STABLE METALLIZATION

Authors

LEE, CW; KIM, YT; MIN, SK; LEE, C; LEE, JY; PARK, TW

Issue Date

1994

Publisher

MATERIALS RESEARCH SOC

Citation

Symposium on Interface Control of Electrical, Chemical, and Mechanical Properties, at the 1993 Fall Meeting of the Materials-Research-Society, v.318, pp.335 - 340

ISSN

0272-9172

URI

https://pubs.kist.re.kr/handle/201004/119061

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KIST Conference Paper > Others

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