A V-Shaped Actuator Utilizing Electrostatic Force

Abstract

In this study, we propose a new V'-shaped actuator with two panels and experimentally and theoretically investigate its actuation to find the most efficient structure. The V-shaped actuator operates like a seesaw. Specifically, when a high voltage input is applied between the V-shaped actuator and metal plate at the bottom substrate, another panel rises due to electrostatic attraction. Both gravity and electrostatic attraction forces are utilized for the operation of the actuator. We made a model of the actuation mechanism considering torque, gravity, and electrostatic forces. Theoretical values were compared with experimental results considering all factors of force applied to actuators. Additionally, we added torque by restoring force to compensate for the experimental conditions. The theoretical value almost coincided with the experimental value with R-2 = 0.9.