DSpace at KIST: Fabrication of 1 μm thickness lead zirconium titanate films using poly(N-vinylpyrrolidone) added sol-gel method

Fabrication of 1 μm thickness lead zirconium titanate films using poly(N-vinylpyrrolidone) added sol-gel method

Citation: Transactions on Electrical and Electronic Materials, v.12, no.5, pp.222 - 225

Abstract: Lead zirconate titanate (PZT) films were fabricated on Pt/Ti/SiO2/Si substrate by the sol-gel method using a sol containing poly(N-vinylpyrrolidone) (PVP). PVP in alkoxide solutions can suppress the condensation reaction in gel films during heat treatment, and increase the viscosity of alkoxide solutions. Single-phase PZT films as thick as 1 μm were deposited by repetitive coating with successive third-step heat treatments at 150°C, 350°C and 650°C;. After heat treatment, the films were crack free, and optically transparent. As a result, we demonstrated a PZT film with a PVP molar ratio of 0.5, which has a permittivity of 734, a dielectric loss of 0.042, a Pr of 40.5 μC/cm2 and an Ec of 156 kV/cm. ？ 2011 KIEEME. All rights reserved.

Keywords: Condensation reactions; Dielectric losses; Gels; Heat treatment; Semiconducting lead compounds; Sol-gels; Sols; Zirconium; After-heat treatment; Alkoxide solutions; Crack free; Gel films; Lead zirconate titanate; Lead zirconium titanate; Lead-zirconate-titanate films; Molar ratio; N vinylpyrrolidone; Poly(vinyl pyrrolidone); Poly-N-vinylpyrrolidone; PZT film; Sol-gel process; Condensation reactions; Dielectric losses; Gels; Heat treatment; Semiconducting lead compounds; Sol-gels; Sols; Zirconium; After-heat treatment; Alkoxide solutions; Crack free; Gel films; Lead zirconate titanate; Lead zirconium titanate; Lead-zirconate-titanate films; Molar ratio; N vinylpyrrolidone; Poly(vinyl pyrrolidone); Poly-N-vinylpyrrolidone; PZT film; Sol-gel process; Lead zirconate titanate; Poly(vinylpyrrolidone); Sol-gel; Thickness control

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