Effects of the AlSb Buffer Layer and the InAs Channel Thickness on the Electrical Properties of InAs/AlSb-Based 2-DEG HEMT Structures

Authors
Shin, S. H.Lim, J. Y.Song, J. D.Kim, H. J.Han, S. H.Kim, T. G.
Issue Date
2008-11
Publisher
KOREAN PHYSICAL SOC
Citation
JOURNAL OF THE KOREAN PHYSICAL SOCIETY, v.53, no.5, pp.2719 - 2724
Abstract
In this study, the effects of various AlSb buffer layers and InAs channel thicknesses on the electrical properties of InAs/AlSb-based 2-dimensional-electron-gas (2-DEG) inverted-High Electron Mobility Transistor (HEMT) structures for applications to spin-Field Effective Transistor (FET) is reported. The optimized similar to 11-nm-thick InAs/AlSb HEMT on AlSb (0.5 mu m)/10 repetition of GaSb/AlSb superlattices/AlSb (1 mu m) shows noticeable values of the electron mobility (similar to 106,900 cm(2)/Vs at 77 K and 25,870 cm(2)/Vs at 300 K) and those are comparable to the state-of-the-art, considering impurity scattering due to doping.
Keywords
MOBILITY TRANSISTORS; ALSB/INAS HEMTS; OHMIC CONTACTS; INTERFACE; TRANSPORT; MOBILITY TRANSISTORS; ALSB/INAS HEMTS; OHMIC CONTACTS; INTERFACE; TRANSPORT; Molecular beam epitaxy; AlSb; InAs; 2-DEG; HEMT
ISSN
0374-4884
URI
https://pubs.kist.re.kr/handle/201004/133008
DOI
10.3938/jkps.53.2719
Appears in Collections:
KIST Article > 2008
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