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Dual surface modifications of silicon surfaces for tribological application in MEMS

Authors

팜두쿠옹; 아르빈드 싱; 윤의성

Issue Date

2007-12

Citation

KSTLE International Journal, v.8, no.2, pp.26 - 28

Keywords

micro; friction; photolithography; silicon; tribology

ISSN

1229-9189

URI

https://pubs.kist.re.kr/handle/201004/133894

Appears in Collections:

KIST Article > 2007

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