Enhanced characteristics of an uncooled microbolometer using vanadium-tungsten oxide as a thermometric material
- Authors
- Han, YH; Kim, KT; Shin, HJ; Moon, S; Choi, IH
- Issue Date
- 2005-06-20
- Publisher
- AMER INST PHYSICS
- Citation
- APPLIED PHYSICS LETTERS, v.86, no.25
- Abstract
- To produce a highly sensitive uncooled microbolometer, the development of a high-performance thermometric material is essential. In this work, amorphous vanadium-tungsten oxide was developed as a thermometric material at a low temperature of 300 degrees C, and the microbolometer, coupled with the material, was designed and fabricated using surface micromachining technology. The vanadium-tungsten oxide showed good properties for application to the microbolometer, such as a high-temperature coefficient of resistance of over -4.0%/K and good compatibility with the surface micromachining and integrated circuit fabrication process due to its low fabrication temperature. As a result, the uncooled microbolometer could be fabricated with high detectivity over 1.0 x 10(9) cm Hz(1/2)/W at a bias current of 7.5 mu A and a chopper frequency of 10 - 20 Hz. (c) 2005 American Institute of Physics.
- Keywords
- BOLOMETERS; SILICON; FILMS; BOLOMETERS; SILICON; FILMS; microbolometer; TCR; vanadium-tungsten oxide; Detectivity
- ISSN
- 0003-6951
- URI
- https://pubs.kist.re.kr/handle/201004/136357
- DOI
- 10.1063/1.1953872
- Appears in Collections:
- KIST Article > 2005
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