Enhanced characteristics of an uncooled microbolometer using vanadium-tungsten oxide as a thermometric material

Authors
Han, YHKim, KTShin, HJMoon, SChoi, IH
Issue Date
2005-06-20
Publisher
AMER INST PHYSICS
Citation
APPLIED PHYSICS LETTERS, v.86, no.25
Abstract
To produce a highly sensitive uncooled microbolometer, the development of a high-performance thermometric material is essential. In this work, amorphous vanadium-tungsten oxide was developed as a thermometric material at a low temperature of 300 degrees C, and the microbolometer, coupled with the material, was designed and fabricated using surface micromachining technology. The vanadium-tungsten oxide showed good properties for application to the microbolometer, such as a high-temperature coefficient of resistance of over -4.0%/K and good compatibility with the surface micromachining and integrated circuit fabrication process due to its low fabrication temperature. As a result, the uncooled microbolometer could be fabricated with high detectivity over 1.0 x 10(9) cm Hz(1/2)/W at a bias current of 7.5 mu A and a chopper frequency of 10 - 20 Hz. (c) 2005 American Institute of Physics.
Keywords
BOLOMETERS; SILICON; FILMS; BOLOMETERS; SILICON; FILMS; microbolometer; TCR; vanadium-tungsten oxide; Detectivity
ISSN
0003-6951
URI
https://pubs.kist.re.kr/handle/201004/136357
DOI
10.1063/1.1953872
Appears in Collections:
KIST Article > 2005
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