Unusual stress behavior in W-incorporated hydrogenated amorphous carbon films

Authors
Wang, AYAhn, HSLee, KRAhn, JP
Issue Date
2005-03-14
Publisher
AMER INST PHYSICS
Citation
APPLIED PHYSICS LETTERS, v.86, no.11
Abstract
Unusual stress behavior was observed in W-incorporated hydrogenated amorphous carbon films prepared by a hybrid process composed of ion-beam deposition and magnetron sputtering. As the tungsten concentration increased from 0 to 2.8 at.%, the residual compressive stress decreased by 50%, without significant deterioration in the mechanical properties. This was followed by a rapid increase and a gradual decrease in the residual stress with increasing W concentration. High-resolution transmission electron microscopy analysis and first-principle calculations show that the reduced directionality of the W-C bonds in the W-incorporated amorphous carbon matrix relaxes the stress caused by the distorted bonds. (C) 2005 American Institute of Physics.
Keywords
DIAMOND-LIKE CARBON; CERAMIC NANOCOMPOSITE COATINGS; MECHANICAL-PROPERTIES; THIN-FILMS; MICROSTRUCTURE; HYDROCARBON; DEPOSITION; ENERGY; DIAMOND-LIKE CARBON; CERAMIC NANOCOMPOSITE COATINGS; MECHANICAL-PROPERTIES; THIN-FILMS; MICROSTRUCTURE; HYDROCARBON; DEPOSITION; ENERGY; diamond-like carbon; stress; w incorporation
ISSN
0003-6951
URI
https://pubs.kist.re.kr/handle/201004/136646
DOI
10.1063/1.1883328
Appears in Collections:
KIST Article > 2005
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