Unusual stress behavior in W-incorporated hydrogenated amorphous carbon films
- Authors
- Wang, AY; Ahn, HS; Lee, KR; Ahn, JP
- Issue Date
- 2005-03-14
- Publisher
- AMER INST PHYSICS
- Citation
- APPLIED PHYSICS LETTERS, v.86, no.11
- Abstract
- Unusual stress behavior was observed in W-incorporated hydrogenated amorphous carbon films prepared by a hybrid process composed of ion-beam deposition and magnetron sputtering. As the tungsten concentration increased from 0 to 2.8 at.%, the residual compressive stress decreased by 50%, without significant deterioration in the mechanical properties. This was followed by a rapid increase and a gradual decrease in the residual stress with increasing W concentration. High-resolution transmission electron microscopy analysis and first-principle calculations show that the reduced directionality of the W-C bonds in the W-incorporated amorphous carbon matrix relaxes the stress caused by the distorted bonds. (C) 2005 American Institute of Physics.
- Keywords
- DIAMOND-LIKE CARBON; CERAMIC NANOCOMPOSITE COATINGS; MECHANICAL-PROPERTIES; THIN-FILMS; MICROSTRUCTURE; HYDROCARBON; DEPOSITION; ENERGY; DIAMOND-LIKE CARBON; CERAMIC NANOCOMPOSITE COATINGS; MECHANICAL-PROPERTIES; THIN-FILMS; MICROSTRUCTURE; HYDROCARBON; DEPOSITION; ENERGY; diamond-like carbon; stress; w incorporation
- ISSN
- 0003-6951
- URI
- https://pubs.kist.re.kr/handle/201004/136646
- DOI
- 10.1063/1.1883328
- Appears in Collections:
- KIST Article > 2005
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