Characterization of uncooled bolometer with vanadium tungsten oxide infrared-active layer

Abstract

A surface micromachining uncooled infrared detector with an optimized vanadium-alloy oxide layer was fabricated, based on low-temperature annealing of a V-W alloy oxide (VWOx) layer. Vanadium oxide is a promising material for an uncooled bolometer, due to its high temperature coefficient of resistance (TCR) at room temperature. An infrared active layer is needed to accompany with the reflective layer to enhance its IR, absorption. Test bolometers were successfully fabricated and then radiated by an IR. laser source at various power levels with a chopper in a, frequency range of 1 similar to 450 Hz. The responsivity and noise of the test; bolometer was measured and the detectivity was calculated. From the result, the calculated detectivity is 1.1 x 10(7) CmHz(1/2)W(-1). The bolometer detectivity can be increased further if the noise in the device is reduced.