적층형 세라믹 엑추에이터를 이용한 MEMS용 압전밸브의 제작 및 특성

Abstract

We report on the development of a piezoelectric valve that is designed to have a high reliability for fluid control systems, such as mass flow control, transportation and chemical analysis. The valve was fabricated using a MCA(multilayer ceramic actuator), which has a low consumption power, high resolution and accurate control. The fabricated valve is composed of MCA, a valve actuator die and an seat die. The design of the actuator die was done by FEM(finite element method) modeling, respectively. And, the valve seat die with 6 trenches was made, and the actuator die, which possible to optimize control to MCA, was fabricated. After Si-wafer direct bonding between the seat die and the actuator die, MCA was also anodic bonded to the seat/actuator die structure. PDMS(poly- dimethylsiloxane) sealing pad was fabricated to minimize a leak-rate. It was also bonded to seat die and stainless steel package. The flow rate was 9.13 sccm at a supplied voltage of 100 V with a 50 % duty ratio and non-linearity was 2.24 % FS. From these results, the fabricated MCA valve is suitable for a variety of flow control equipments, a medical bio-system, semiconductor fabrication process, automobile and air transportation industry with low cost, batch process and mass production.