DSpace at KIST: Fabrication of 3-D structures by inclined and rear-side exposures

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DC Field	Value	Language
dc.contributor.author	이준섭	-
dc.contributor.author	신현준	-
dc.contributor.author	문성욱	-
dc.contributor.author	송석호	-
dc.contributor.author	김태엽	-
dc.date.accessioned	2024-01-21T07:40:55Z	-
dc.date.available	2024-01-21T07:40:55Z	-
dc.date.created	2022-01-10	-
dc.date.issued	2004-01	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/137954	-
dc.title	Fabrication of 3-D structures by inclined and rear-side exposures	-
dc.title.alternative	선택적 경사 노광과 후면 노광에 의한 3차원 구조물의 제작	-
dc.type	Article	-
dc.description.journalClass	3	-
dc.identifier.bibliographicCitation	한국전기학회논문지, v.53, pp.47 - 52	-
dc.citation.title	한국전기학회논문지	-
dc.citation.volume	53	-
dc.citation.startPage	47	-
dc.citation.endPage	52	-
dc.subject.keywordAuthor	선택위치노광	-
dc.subject.keywordAuthor	경사노광	-
dc.subject.keywordAuthor	후면노광	-
dc.subject.keywordAuthor	반사방지막	-
dc.subject.keywordAuthor	SU-8	-
dc.subject.keywordAuthor	V-groove	-

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