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Fabrication of 3-D structures by inclined and rear-side exposures

Other Titles

선택적 경사 노광과 후면 노광에 의한 3차원 구조물의 제작

Authors

이준섭; 신현준; 문성욱; 송석호; 김태엽

Issue Date

2004-01

Citation

한국전기학회논문지, v.53, pp.47 - 52

Keywords

선택위치노광; 경사노광; 후면노광; 반사방지막; SU-8; V-groove

URI

https://pubs.kist.re.kr/handle/201004/137954

Appears in Collections:

KIST Article > 2004

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