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바이어스 스퍼터링 법으로 제조된 LiCoO2 박막 I. 전기화학적 특성

Other Titles

LiCoO2 Thin Film Deposited by Bias Sputtering Method I. Electrochemical Characteristics

Authors

이영재; 박호영; 조병원; 조원일; 김광범

Issue Date

2003-11

Publisher

한국전기화학회

Citation

전기화학회지, v.6, no.4, pp.261 - 265

Keywords

LiCoO2; Thin film; Substrate bias; Sputtering; Microbatteries

ISSN

1229-1935

URI

https://pubs.kist.re.kr/handle/201004/138103

Appears in Collections:

KIST Article > 2003

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