바이어스 스퍼터링 법으로 제조된 LiCoO2 박막 I. 전기화학적 특성
- Other Titles
- LiCoO2 Thin Film Deposited by Bias Sputtering Method I. Electrochemical Characteristics
- Authors
- 이영재; 박호영; 조병원; 조원일; 김광범
- Issue Date
- 2003-11
- Publisher
- 한국전기화학회
- Citation
- 전기화학회지, v.6, no.4, pp.261 - 265
- Keywords
- LiCoO2; Thin film; Substrate bias; Sputtering; Microbatteries
- ISSN
- 1229-1935
- URI
- https://pubs.kist.re.kr/handle/201004/138103
- Appears in Collections:
- KIST Article > 2003
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