Nanocomposite ta-C films prepared by the filtered vacuum arc process using nanosized Ni dots on a Si substrate

Authors
Lee, CSKim, TYLee, KRAhn, JPYoon, KH
Issue Date
2003-10-28
Publisher
ELSEVIER SCIENCE BV
Citation
CHEMICAL PHYSICS LETTERS, v.380, no.5-6, pp.774 - 779
Abstract
Recently, structural manipulation of tetrahedral amorphous carbon (ta-C) film at the nanometer scale has attracted much attention. We demonstrate a novel method to obtain a nanocomposite film where nanoscale columns of graphitic phase are embedded in a tetrahedral amorphous carbon matrix. When using a Si substrate with nanosized Ni dots on the surface, graphitic columns grew selectively on the Ni dots, while a dense ta-C film was deposited on the bare Si surface. The growth of the graphitic columns is closely related to the nanosized Ni dots that catalyze the graphitic-carbon formation in a filtered vacuum arc deposition condition. (C) 2003 Elsevier B.V. All rights reserved.
Keywords
AMORPHOUS-CARBON FILMS; DIAMOND-LIKE CARBON; ION ENERGY; STRESS; COATINGS; AMORPHOUS-CARBON FILMS; DIAMOND-LIKE CARBON; ION ENERGY; STRESS; COATINGS
ISSN
0009-2614
URI
https://pubs.kist.re.kr/handle/201004/138139
DOI
10.1016/j.cplett.2003.09.081
Appears in Collections:
KIST Article > 2003
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML

qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE