Nanocomposite ta-C films prepared by the filtered vacuum arc process using nanosized Ni dots on a Si substrate
- Authors
- Lee, CS; Kim, TY; Lee, KR; Ahn, JP; Yoon, KH
- Issue Date
- 2003-10-28
- Publisher
- ELSEVIER SCIENCE BV
- Citation
- CHEMICAL PHYSICS LETTERS, v.380, no.5-6, pp.774 - 779
- Abstract
- Recently, structural manipulation of tetrahedral amorphous carbon (ta-C) film at the nanometer scale has attracted much attention. We demonstrate a novel method to obtain a nanocomposite film where nanoscale columns of graphitic phase are embedded in a tetrahedral amorphous carbon matrix. When using a Si substrate with nanosized Ni dots on the surface, graphitic columns grew selectively on the Ni dots, while a dense ta-C film was deposited on the bare Si surface. The growth of the graphitic columns is closely related to the nanosized Ni dots that catalyze the graphitic-carbon formation in a filtered vacuum arc deposition condition. (C) 2003 Elsevier B.V. All rights reserved.
- Keywords
- AMORPHOUS-CARBON FILMS; DIAMOND-LIKE CARBON; ION ENERGY; STRESS; COATINGS; AMORPHOUS-CARBON FILMS; DIAMOND-LIKE CARBON; ION ENERGY; STRESS; COATINGS
- ISSN
- 0009-2614
- URI
- https://pubs.kist.re.kr/handle/201004/138139
- DOI
- 10.1016/j.cplett.2003.09.081
- Appears in Collections:
- KIST Article > 2003
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