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dc.contributor.author안준양-
dc.contributor.author김대은-
dc.contributor.author최진용-
dc.contributor.author신경호-
dc.date.accessioned2024-01-21T09:05:35Z-
dc.date.available2024-01-21T09:05:35Z-
dc.date.created2022-01-10-
dc.date.issued2003-04-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/138663-
dc.titleFriction properties of carbon coated ultra-thin film using Taguchi experimental design-
dc.title.alternative다구찌 실험계획법을 이용한 탄소코팅 초박막의 마찰 특성-
dc.typeArticle-
dc.description.journalClass3-
dc.identifier.bibliographicCitation한국정밀공학회지, v.20, no.4, pp.143 - 150-
dc.citation.title한국정밀공학회지-
dc.citation.volume20-
dc.citation.number4-
dc.citation.startPage143-
dc.citation.endPage150-
dc.subject.keywordAuthordeposition condition-
dc.subject.keywordAuthorRelative humidity-
dc.subject.keywordAuthorTaguchi experimental design-
dc.subject.keywordAuthorUltra-thin carbon coating film-
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KIST Article > 2003
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