DSpace at KIST: Growth of heteroepitaxial ZnO thin film by off-axis RF magnetron sputtering

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DC Field	Value	Language
dc.contributor.author	박재완	-
dc.contributor.author	박종완	-
dc.contributor.author	이전국	-
dc.date.accessioned	2024-01-21T09:10:36Z	-
dc.date.available	2024-01-21T09:10:36Z	-
dc.date.created	2022-01-10	-
dc.date.issued	2003-03	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/138754	-
dc.title	Growth of heteroepitaxial ZnO thin film by off-axis RF magnetron sputtering	-
dc.title.alternative	Off-axis 고주파 마그네트론 스퍼터링법을 이용한 이종에피텍셜 ZnO 박막 성장	-
dc.type	Article	-
dc.description.journalClass	3	-
dc.identifier.bibliographicCitation	한국세라믹학회지 = Journal of the Korean Ceramic Society, v.v. 40, no.no. 3, pp.262 - 267	-
dc.citation.title	한국세라믹학회지 = Journal of the Korean Ceramic Society	-
dc.citation.volume	v. 40	-
dc.citation.number	no. 3	-
dc.citation.startPage	262	-
dc.citation.endPage	267	-
dc.subject.keywordAuthor	Heteroepitaxial	-

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