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dc.contributor.author박윤권-
dc.contributor.author주병권-
dc.date.accessioned2024-01-21T09:11:11Z-
dc.date.available2024-01-21T09:11:11Z-
dc.date.created2022-01-10-
dc.date.issued2003-03-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/138765-
dc.titleIEEE MEMS'03 학회 분석 보고 .-
dc.typeArticle-
dc.description.journalClass3-
dc.identifier.bibliographicCitation월간전자부품, pp.2 - 6.-
dc.citation.title월간전자부품-
dc.citation.startPage2-
dc.citation.endPage6.-
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