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Microstructure control of tungsten film for bragg reflectors of thin film bulk acoustic wave resonators.

Other Titles

체적탄성파 공진기 브라그 반사층 적용을 위한 텅스텐 박막의 미세구조 조절에 대한 연구 =

Authors

강성철; 이시형; 박종완; 이전국

Issue Date

2003-03

Citation

한국세라믹학회지 = Journal of the Korean Ceramic Society, v.v. 40, no.no. 3, pp.268 - 272.

Keywords

Tungsten

URI

https://pubs.kist.re.kr/handle/201004/138775

Appears in Collections:

KIST Article > 2003

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