DSpace at KIST: The use of an electron cyclotron resonance plasma to fabrication a photovoltaic HgCdTe diode for MWIR detection

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DC Field	Value	Language
dc.contributor.author	안세영	-
dc.contributor.author	이상훈	-
dc.contributor.author	서상희	-
dc.contributor.author	김진상	-
dc.date.accessioned	2024-01-21T09:34:44Z	-
dc.date.available	2024-01-21T09:34:44Z	-
dc.date.created	2022-01-10	-
dc.date.issued	2003-01	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/138927	-
dc.title	The use of an electron cyclotron resonance plasma to fabrication a photovoltaic HgCdTe diode for MWIR detection	-
dc.title.alternative	Electron cyclotron resonance (ECR) plasma를 이용한 중적외선감지용 광전압형 HgCdTe 소자 제작	-
dc.type	Article	-
dc.description.journalClass	3	-
dc.identifier.bibliographicCitation	새물리, v.v. 46, no.1, pp.47 - 51	-
dc.citation.title	새물리	-
dc.citation.volume	v. 46	-
dc.citation.number	1	-
dc.citation.startPage	47	-
dc.citation.endPage	51	-
dc.subject.keywordAuthor	ECR	-

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