DSpace at KISTKIST Article2002

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dc.contributor.author김인태-
dc.contributor.author박윤권-
dc.contributor.author이시형-
dc.contributor.author이윤희-
dc.contributor.author이전국-
dc.contributor.author김남수-
dc.contributor.author주병권-
dc.date.accessioned2024-01-21T09:38:46Z-
dc.date.available2024-01-21T09:38:46Z-
dc.date.created2022-01-10-
dc.date.issued2002-12-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/138998-
dc.titleMonolithic film bulk acoustic wave resonator using SOI wafer-
dc.title.alternativeSOI 웨이퍼를 이용한 압전박막공진기 제작-
dc.typeArticle-
dc.description.journalClass3-
dc.identifier.bibliographicCitation전기전자재료학회논문지 = Journal of the Korean Institute of Electrical and Electronic Material Eng, v.15, no.12, pp.1039 - 1044-
dc.citation.title전기전자재료학회논문지 = Journal of the Korean Institute of Electrical and Electronic Material Eng-
dc.citation.volume15-
dc.citation.number12-
dc.citation.startPage1039-
dc.citation.endPage1044-
dc.subject.keywordAuthorFBAR-
dc.subject.keywordAuthorpiezoelectric-
dc.subject.keywordAuthorSOI-
dc.subject.keywordAuthorMMIC-
dc.subject.keywordAuthormembrane-
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