DSpace at KIST: Fabrication of 3-Dimensional Microstructures for Bulk Micromachining by SDB and Electrachemical Etch-Stop

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DC Field	Value	Language
dc.contributor.author	정귀상	-
dc.contributor.author	김재민	-
dc.contributor.author	윤석진	-
dc.date.accessioned	2024-01-21T09:43:00Z	-
dc.date.available	2024-01-21T09:43:00Z	-
dc.date.created	2022-01-10	-
dc.date.issued	2002-11	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/139072	-
dc.title	Fabrication of 3-Dimensional Microstructures for Bulk Micromachining by SDB and Electrachemical Etch-Stop	-
dc.title.alternative	SDB와 전기화학적 식각정지에 의한 벌크 마이크로머신용 3차원 미세구조물 제작	-
dc.type	Article	-
dc.description.journalClass	3	-
dc.identifier.bibliographicCitation	전기전자재료학회논문지, v.15, no.11, pp.958 - 962	-
dc.citation.title	전기전자재료학회논문지	-
dc.citation.volume	15	-
dc.citation.number	11	-
dc.citation.startPage	958	-
dc.citation.endPage	962	-
dc.subject.keywordAuthor	free-standing microstructure	-
dc.subject.keywordAuthor	Micromachining	-
dc.subject.keywordAuthor	SDB	-
dc.subject.keywordAuthor	SOI	-
dc.subject.keywordAuthor	Electrachemical etch-stop	-
dc.subject.keywordAuthor	DRIE	-

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