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dc.contributor.author문성욱-
dc.date.accessioned2024-01-21T10:02:25Z-
dc.date.available2024-01-21T10:02:25Z-
dc.date.created2022-01-10-
dc.date.issued2002-10-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/139154-
dc.titleOptical MEMS-MEMS 기술의 엑츄에이터 응용 ( Ⅱ )(Projection display 를 중심으로 )-
dc.typeArticle-
dc.description.journalClass3-
dc.identifier.bibliographicCitation월간반도체 = Semiconductor Monthly, v.176, pp.41 - 58-
dc.citation.title월간반도체 = Semiconductor Monthly-
dc.citation.volume176-
dc.citation.startPage41-
dc.citation.endPage58-
dc.subject.keywordAuthorMEMS-
dc.subject.keywordAuthordisplay-
dc.subject.keywordAuthorprojection-
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KIST Article > 2002
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