DSpace at KIST: A study on the ZnO piezoelectric thin films for SAW filter by RF magnetron sputtering

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DC Field	Value	Language
dc.contributor.author	최형욱	-
dc.contributor.author	김경환	-
dc.contributor.author	김상종	-
dc.contributor.author	강종윤	-
dc.contributor.author	안병국	-
dc.contributor.author	윤석진	-
dc.date.accessioned	2024-01-21T10:06:25Z	-
dc.date.available	2024-01-21T10:06:25Z	-
dc.date.created	2022-01-10	-
dc.date.issued	2002-09	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/139224	-
dc.title	A study on the ZnO piezoelectric thin films for SAW filter by RF magnetron sputtering	-
dc.title.alternative	RF 마그네트론 스퍼터링에 의한 SAW 필터용 ZnO 압전 박막에 관한 연구	-
dc.type	Article	-
dc.description.journalClass	3	-
dc.identifier.bibliographicCitation	전기전자재료학회논문지, v.15, no.9, pp.798 - 807	-
dc.citation.title	전기전자재료학회논문지	-
dc.citation.volume	15	-
dc.citation.number	9	-
dc.citation.startPage	798	-
dc.citation.endPage	807	-
dc.subject.keywordAuthor	ZnO	-
dc.subject.keywordAuthor	preferred orientation	-
dc.subject.keywordAuthor	surface roughness	-
dc.subject.keywordAuthor	resistivity	-
dc.subject.keywordAuthor	RF magnetron sputter	-

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