Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 문성욱 | - |
| dc.date.accessioned | 2024-01-21T10:06:38Z | - |
| dc.date.available | 2024-01-21T10:06:38Z | - |
| dc.date.created | 2022-01-10 | - |
| dc.date.issued | 2002-09 | - |
| dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/139228 | - |
| dc.title | Optical MEMS-MEMS 기술의 엑츄에이터 응용 (I)( 광통신 부품을 중심으로 ) | - |
| dc.type | Article | - |
| dc.description.journalClass | 3 | - |
| dc.identifier.bibliographicCitation | Semiconductor Monthly, v.175, pp.91 - 99 | - |
| dc.citation.title | Semiconductor Monthly | - |
| dc.citation.volume | 175 | - |
| dc.citation.startPage | 91 | - |
| dc.citation.endPage | 99 | - |
| dc.subject.keywordAuthor | MEMS | - |
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- KIST Article > 2002
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