High frequency response of Bragg reflector type film bulk acoustic wave resonator

Abstract

We fabricated a Bragg reflector type FBAR using AlN piezoelectric with quarter wavelength thickness, where the Bragg reflector was composed Of W-SiO(2) pairs. By numerical simulation considering actual acoustic losses of each layer, we analyzed the frequency response of the resonator and could explain it using an equivalent circuit with parasitic elements. The Effective electromechanical coupling constant (K(eff)(2)) and the Quality factor (Q(s)), figures of merit of the resonator, were about 1.1% and 307, respectively.